QuickChange® NX 不凝滤器为基于水的、脱气和碱性化学物质在≥28 nm 工艺节点中的清洁高温过滤提供了一种经济高效的解决方案。该滤器采用全 PTFE 膜结构并配有 PFA 支撑，通过多种膜配置满足不同的工艺需求。其先进的清洗标准可有效降低金属、氯化物及颗粒物的释放，确保有机提取物含量更低，并最大化设备产量。由于 QuickChange NX 采用超纯 DI 水“亲水”包装，因此使用前无需预先用 IPA 湿润。这个
包装可防止酒精与化学物质发生相互作用，避免潜在的污染源，并防止滤芯失水，从而避免突发性流量损失和非计划性的滤芯更换。
应用领域
QuickChange® NX 过滤器应用
行业：半导体、平板显示、数据存储、LED
工艺：湿法刻蚀与清洗、磁头式湿法刻蚀与清洗、批量化学品输送
化学性质：强酸、强碱、溶剂
安装位置：工具点、供料点、批量输送点
特点与优势—
非润湿性聚四氟乙烯（PTFE）膜
采用PFA材质
适用于高温水性应用
UCM-16清洗技术
增强清洁性能，确保有机物可提取物更低
启动速度快
“亲水”包装设计
适用于超纯去离子水
使用前无需预用IPA润湿
防止酒精与化学物质发生相互作用
避免潜在的污染源
防止脱水现象，从而避免突发流量损失和意外更换滤芯全面的
水性基质
化学兼容性
高温工艺，包括：
SC1、SC2、SPM、氮化物刻蚀、金属刻蚀，以及各种半水性阻焊带
低温工艺，包括：
H₂SO₄、H₃PO₄、HNO₃、HCl、NH₄OH、H₂O₂、TMAH 和臭氧水
产品规格
材料：膜层、预湿型非润湿性聚四氟乙烯（PTFE）
支撑材料：聚偏氟乙烯（PFA）
适用于滤芯过滤器
滤芯连接方式：代码0（AS568-222）O型圈
滤芯O型圈：E-FKM、E-ETP、Chemraz® 或 Kalrez®
卡扣（仅限带Chemlock®卡扣的滤芯）：PFA
适用于一次性过滤器
外壳材质：PFA
截留等级：15 nm（NXT、NXE、NXF、NXG）
30 nm、0.05 µm、0.1 µm、0.2 µm（NXT、NXX、NXM、NXE）
膜面积：
NXT NXX NXM NXE NXM NXG
30 nm、0.05 µm、0.1 µm、0.2 µm
4英寸 – 0.5 m²（5.4平方英尺）–
10英寸 0.9 m²（9.7平方英尺） 1.3 m²（14平方英尺） 1.8 m²（19.4平方英尺） 2.2 m²（23.7平方英尺）–
20英寸 1.8 m²（19.4平方英尺） 2.6 m²（28平方英尺） 3.6 m²（38.8平方英尺） 4.4 m²（47.4平方英尺）–
30英寸 2.7 m²（29平方英尺）–
15 nm
10英寸 0.9 m²（9.7平方英尺） _ _ 2 m²（21.5平方英尺） 2.4 m²（25.8平方英尺） 3 m²（32.3平方英尺）
20英寸 1.8 m²（19.4平方英尺）–– 4 m²（43.1平方英尺） 4.8 m²（51.7平方英尺） 6 m²（64.6平方英尺）
最大工作条件：
最大工作压力 0.58 MPa（5.8 bar，84 psi） @ 25℃（77°F）
0.097 MPa（0.97 bar，14 psi）@ 200℃（392°F）
最大正向压差 0.44 MPa（4.4 bar，64 psi）@ 25℃（77°F）
0.05 MPa（0.52 bar，7.5 psi）@ 200℃（392°F）
最大反向压力 0.34 MPa（3.45 bar，50 psi）@ 25℃（77°F）
最高工作温度 200℃（392°F）金属提取物：标准和UCM-16：检测23种金属
其他提取物：标准和UCM-16：总有机碳（TOC）、氯（Cl）、氟（F）
PART NUMBERS
QuickChange® NX Filter Part Numbers
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| NX2GM10M01FP |
NX2GX10M01FP |
NX2GX10M21FP |
NX2GXS0M31FP |
NX2VE10M01FP |
| NX2VE10M01SP |
NX2VE1CM41SP |
NX2VX10M01FP |
NX2VX10M21FP |
NX2VX10M41FP |
| NX2VXS0M01FP |
NX2VXS0M21FP |
NX2VXS0M31FP |
NX2WE10142SP |
NX2WE10M01FP |
| NX2WE10M21FP |
NX2WE1C102SP |
NX2WE1C142SP |
NX2WE1CM01FP |
NX2WE1CM21FP |
| NX2WE1CM41FP |
NX2WE1CM41SP |
NX2YE10M01FP |
NX2YE10M21FP |
NX2YE1C142SP |
| NX2YE1CM016P |
NX2YE1CM01FP |
NX2YE1CM01SP |
NX2YE1CM416P |
NX2YE1CM41FP |
| NX2YE1CM41SP |
NX2YM10M01FP |
NX2YM10M21FP |
NX2YM1CM01FP |
NX2YXS0M01FP |
| NX2ZE10M01FP |
NX2ZE10M41FP |
NX2ZE1C142SP |
NX2ZE1CM41FP |
NX2ZE1CM41SP |
| NX2ZM10M01FP |
NX2ZM10M41FP |
NX2ZM1CM41FP |
NX2ZX10M01FP |
NX2ZX10M21FP |
| NX2ZXS0M21FP |
NX2ZXS0M31FP |
NXCGM1000KP |
NXCGM100BKP |
NXCGT10000P |
| NXCGT1000KP |
NXCGX10000P |
NXCGX1000KP |
NXCGX100BKD |
NXCGX100KKP |
| NXCGXS0000P |
NXCVE1000KP |
NXCVM10000P |
NXCVM1000KP |
NXCVM1C0B0P |
| NXCVM1C0BKP |
NXCVM2000KP |
NXCVT10000P |
NXCVT1000KP |
NXCVT20000P |
| NXCVX10000P |
NXCVX1000KP |
NXCVX100B0P |
NXCVX100BKP |
NXCVX100K0P |
| NXCVX100KKP |
NXCVX100RKP |
NXCVX1C000P |
NXCVX1C0KKP |
NXCVX2000KP |
| NXCVXS0000P |
NXCW31C0B0P |
NXCW31C0BKP |
NXCW320000P |
NXCWE10000P |
| NXCWE1000KP |
NXCWE100B0P |
NXCWE100BKP |
NXCWE1C00KP |
NXCWE1C0BKP |
| NXCWE2000KP |
NXCWE200B0P |
NXCWT100R0P |
NXCWT20000P |
NXCYE10000P |
| NXCYE1000KP |
NXCYE100BKP |
NXCYE100K0P |
NXCYE100KKP |
NXCYE100R0P |
| NXCYE100RKP |
NXCYE1C00KP |
NXCYE1C0BKP |
NXCYE20000P |
NXCYE2000KP |
| NXCYE200K0P |
NXCYM10000P |
NXCYM1000KP |
NXCYM100B0P |
NXCYM100BKP |
| NXCYM1C0B0P |
NXCYM1C0BKP |
NXCYM2000KP |
NXCYX1000KP |
NXCYXS000KP |
| NXCZE1000KP |
NXCZE1C0BKP |
NXCZE20000P |
NXCZE200K0P |
NXCZM10000P |
| NXCZM1000KP |
NXCZM100B0P |
NXCZM100BKP |
NXCZM100CKP |
NXCZM100K0P |
| NXCZM100KKP |
NXCZM100RKP |
NXCZM1C00KP |
NXCZM1C0B0P |
NXCZM1C0BKP |
| NXCZM20000P |
NXCZM2000KP |
NXCZT10000P |
NXCZT1000KP |
NXCZT100CKP |
| NXCZT100K0P |
NXCZT20000P |
NXCZX10000P |
NXCZX1000KP |
NXCZX100B0P |
| NXCZX100BKP |
NXCZX100K0P |
NXCZX100KKP |
NXCZX100R0P |
NXCZX100RKP |
| NXCZX20000P |
NXCZXS0000P |
NXDGE10B022P |
NXDGE10T02HP |
NXDGM10B022P |
| NXDGM10L02HP |
NXDGM10T02HP |
NXDGX10902SP |
NXDGX10B022P |
NXDGX10B02HP |
| NXDGX10B02SP |
NXDGX10B02WP |
NXDGX10L02HP |
NXDGX10T02HP |
NXDGXS0T02HP |
| NXDVE10T02HP |
NXDVM10902SP |
NXDVM10B022P |
NXDVM10L02HP |
NXDVM10T02HP |
| NXDVX10B022P |
NXDVX10B02HP |
NXDVX10B02SP |
NXDVX10B02WP |
NXDVX10L02HP |
| NXDVX1CT02HP |
NXDVXS0902SP |
NXDVXS0B02SP |
NXDVXS0B02WP |
NXDVXS0F022P |
| NXDVXS0L02HP |
NXDVXS0T02HP |
NXDWE1CT02HP |
NXDYE10L02HP |
NXDYE10T02HP |
| NXDYE1C902SP |
NXDYE1C942SP |
NXDYM10B022P |
NXDYM10B02SP |
NXDYM10L02HP |
| NXDYM10T02HP |
NXDYM1C942SP |
NXDYM1CL02HP |
NXDYM1CT02HP |
NXDZE10L02HP |
| NXDZE10T02HP |
NXDZM10902SP |
NXDZM10B022P |
NXDZM10L02HP |
NXDZM10T02HP |
| NXDZM10T42HP |
NXDZM1C902SP |
NXDZM1CT02HP |
NXDZX10B022P |
NXDZX10B02HP |
| NXDZX10B02WP |
NXDZX10L02HP |
NXDZX10T02HP |
NXDZX1CL02HP |
NXDZXS0L02HP |
| NXDZXS0T02HP |
NXPG300M21HP |
NXPV100M11FP |
NXPV100M11HP |
NXPV100M66HP |
| NXPV150M31FP |
NXPV150M31SP |
NXPV150M86HP |
NXPV150M86SP |
NXPV300M21HP |
| NXPV300M21SP |
NXPV300M31FP |
NXPV300M31SP |
NXPV300M86HP |
NXPV300M86SP |
| NXPW150M86SP |
NXPW15CM31FP |
NXPW15CM31SP |
NXPW15CM86HP |
NXPW15CM86SP |
| NXPW300M21HP |
NXPW300M86SP |
NXPW30CM21HP |
NXPW30CM21SP |
NXPW30CM31FP |
| NXPW30CM31SP |
NXPW30CM86HP |
NXPY100M66HP |
NXPY150M31FP |
NXPY150M31SP |
| NXPY150M86HP |
NXPY150M86SP |
NXPY15CM31FP |
NXPY300M21HP |
NXPY300M21SP |
| NXPY300M31FP |
NXPY300M31SP |
NXPY300M86SP |
NXPY30CM21SP |
NXPZ100M11FP |
| NXPZ100M11HP |
NXPZ100M66HP |
NXPZ150M31FP |
NXPZ150M31SP |
NXPZ150M86HP |
| NXPZ150M86SP |
NXPZ300M21HP |
NXPZ300M21SP |
NXPZ300M31FP |
NXPZ300M31SP |
| NXPZ300M86SP |
NXPZ30CM21SP |
NXVGM10942SP |
NXVGX10902SP |
NXVVE10942SP |
| NXVVM10902SP |
NXVVM10942SP |
NXVVM10B02SP |
NXVVM10T02SP |
NXVVM10T42HP |
| NXVVX10902SP |
NXVVX10942SP |
NXVVX10T02SP |
NXVW31C942SP |
NXVWE10902SP |
| NXVWE10942SP |
NXVWE10T02HP |
NXVWE10T02SP |
NXVYE10902SP |
NXVYE10942SP |
| NXVYE10T02HP |
NXVYE1C902SP |
NXVYE1C942SP |
NXVYM10902SP |
NXVYM10942SP |
| NXVYM10L02HP |
NXVYM10T02HP |
NXVYM10T02SP |
NXVYM1C902SP |
NXVYM1C942SP |
| NXVZE10902SP |
NXVZE10942SP |
NXVZE1C902SP |
NXVZM10902SP |
NXVZM10942SP |
| NXVZM10T02HP |
NXVZM10T02SP |
NXVZM1C902SP |
NXVZM1C942SP |
NXVZM1CT02SP |
| NXVZX10902SP |
NXVZX10942SP |