APPLIED MATERIALS 0010-63791 LOADLOCK CHAMBER 0190-54812 AMAT ENTEGRIS WG3D401R2
Lam料号 796-901040-001
产品规格
材料
扩散元件：专利烧结镍膜滤芯
外壳：316L不锈钢
内表面粗糙度：≤32微英寸（Ra）
性能
下游洁净度：在额定流量下，洁净度低于0.03个颗粒/升（<1个颗粒/立方英尺），大于0.01微米
去除等级：≥0.0015微米
可靠性：在25°C（77°F）最大额定进气压力下，可达到10万次循环的可靠性
连接方式
参见数据表
工作条件
参见数据表
通过减少载气室和转移腔中的颗粒物和排气时间，提高效率和通量。
专利烧结镍技术可在各种应用中提供性能
设计可去除进气中粒径大于0.0015微米的颗粒，大限度减少晶圆缺陷
实现快速排气，不扰动或增加晶圆颗粒，缩短工艺周期，提高生产吞吐量
结合扩散器的流体特性与高效过滤器，提升整体效率和处理能力
可轻松改造或安装至现有设备，大限度减少停机时间
PART NUMBERS
Chambergard™ Fast Vent Diffusers Part Numbers
| PART NUMBER |
O-RING SIZE |
O-RING GROOVE OD |
OUTLET CONNECTION TYPE |
O-RING GROOVE ID |
O-RING GROOVE DEPTH |
OPERATING CONDITIONS, MAXIMUM INLET PRESSURE WITH OUTLET TO VACUUM |
OPERATING CONDITIONS, MAXIMUM DIFFERENTIAL PRESSURE |
OPERATING CONDITIONS, MAXIMUM OPERATING TEMPERATURE |
INLET CONNECTION TYPE |
| SI2P134R5 |
None |
None |
In-Line |
None |
None |
0.5 MPa (75 psi) |
0.24 MPa (35 psi) |
100° C (212° F) with O-Ring, 400° C (752° F) with no O-Ring |
1/4" VCR® compatible male gasket seal fitting |
| WG3D16TR2 |
2-117 |
26.4 mm (1.03") |
ISO NW-16, bulkhead mounting compatible with standard ISO bulkhead clamps |
20.3 mm (0.79") |
1.9 mm (0.07") |
0.7 MPa (100 psi) |
0.8 MPa (115 psi) |
100° C (212° F) with O-Ring, 400° C (752° F) with no O-Ring |
1/4" VCR® compatible male gasket seal fitting |
| WG3D228R2 |
2-117 |
26.4 mm (1.03") |
ISO NW-16, bulkhead mounting compatible with standard ISO bulkhead clamps |
20.3 mm (0.79") |
1.9 mm (0.07") |
0.7 MPa (100 psi) |
0.8 MPa (115 psi) |
100° C (212° F) with O-Ring, 400° C (752° F) with no O-Ring |
1/4" VCR® compatible male or female gasket seal fitting or butt weld fitting |
| WG3D25LR2 |
2-123 |
35.9 mm (1.41") |
ISO NW-25, bulkhead mounting compatible with standard ISO bulkhead clamps |
29.8 mm (1.17") |
1.9 mm (0.07") |
0.7 MPa (100 psi) |
0.8 MPa (115 psi) |
100° C (212° F) with O-Ring, 400° C (752° F) with no O-Ring |
1/4" VCR® compatible male gasket seal fitting |
| WG3D25SR2 |
2-123 |
35.9 mm (1.41") |
ISO NW-25, bulkhead mounting compatible with standard ISO bulkhead clamps |
29.8 mm (1.17") |
1.9 mm (0.07") |
0.7 MPa (100 psi) |
0.8 MPa (115 psi) |
100° C (212° F) with O-Ring, 400° C (752° F) with no O-Ring |
1/4" VCR® compatible male gasket seal fitting |
| WG3D3LBW2 |
None |
None |
None |
None |
None |
0.7 MPa (100 psi) |
0.8 MPa (115 psi) |
100° C (212° F) with O-Ring, 400° C (752° F) with no O-Ring |
20 mm butt weld tube stub |
| WG3D401R2 |
2-246 |
114.3 mm (4.50") |
ISO NW-100, bolt through |
122.4 mm (4.81) |
2.6 mm (0.10") |
0.25 MPa (35 psi) |
0.35 MPa (50 psi) |
100° C (212° F) with O-Ring, 400° C (752° F) with no O-Ring |
1/4" VCR® compatible male gasket seal fitting |
| WG3D40DR2 |
2-224 |
52.1 mm (2.05") |
ISO NW-40, bulkhead mounting compatible with standard ISO bulkhead clamps |
44 mm (1.73") |
2.6 mm (0.10") |
0.3 MPa (45 psi) |
0.4 MPa (60 psi) |
100° C (212° F) with O-Ring, 400° C (752° F) with no O-Ring |
1/4" VCR® compatible male gasket seal fitting |
| WG3D40TR2 |
2-224 |
52.1 mm (2.05") |
ISO NW-40, bulkhead mounting compatible with standard ISO bulkhead clamps |
44 mm (1.73") |
2.6 mm (0.10") |
0.7 MPa (100 psi) |
0.8 MPa (115 psi) |
100° C (212° F) with O-Ring, 400° C (752° F) with no O-Ring |
1/4" VCR® compatible male gasket seal fitting |
| WG3D50DR2 |
2-229 |
67.9 mm (2.67") |
ISO NW-50, bulkhead mounting compatible with standard ISO bulkhead clamps |
59.9 mm (2.35") |
2.6 mm (0.10") |
0.2 MPa (30 psi) |
0.3 MPa (45 psi) |
100° C (212° F) with O-Ring, 400° C (752° F) with no O-Ring |
1/4" VCR® compatible male gasket seal fitting |