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现货IHAY01M01K英特格过滤器美国ENTEGRIS
  • 现货IHAY01M01K英特格过滤器美国ENTEGRIS

  • 低温度稀酸过滤器,可在10纳米以上技术节点中实现卓YUE的流速性能和截留能力。
    应用领域  
    Intercept® HP/HS 过滤器应用  
    行业:半导体(湿法刻蚀与清洗、批量化学品输送)  
    化学性质:稀酸  
    安装位置:工具端点

Intercept® 液体过滤器可为关键的稀释、水性及低中性pH清洁应用提供一流过滤效果。这个
7纳米滤膜类型可确保更紧密的颗粒截留和超洁净过滤,同时保持稳定的流速。Intercept的双捕获机制结合筛分与非筛分截留技术,有效保留细小颗粒,减少晶圆表面缺陷,并降低金属、氯化物及颗粒含量。亲水性膜层可防止因膜层脱水导致的流量骤降,无需预润湿处理。Intercept滤膜满足多种工艺需求,适用于先进应用,实现高产率过滤,延长滤膜使用寿命,并提升工艺稳定性。
特点与优势—
非润湿性聚四氟乙烯(PTFE)膜  
采用PFA材质  
适用于高温水性应用  
UCM-16清洗技术  
增强清洁性能,确保有机物可提取物更低  
启动时间更短  
“亲水”包装设计  
适用于超纯去离子水  
使用前无需预用IPA润湿  
防止酒精与化学物质发生相互作用  
避免潜在的污染源  
防止脱水现象,从而避免突发流量损失和非计划性的滤芯更换全面的
水性基质  
化学兼容性  
高温工艺包括:  
SC1、SC2、SPM、氮化物刻蚀、金属刻蚀,以及各种半水性阻焊条  
低温工艺包括:  
H₂SO₄、H₃PO₄、HNO₃、HCl、NH₄OH、H₂O₂、TMAH 和臭氧水
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PART NUMBERS

Intercept® HP/HS Filters Part Numbers

PART NUMBER FORM FACTOR TYPICAL FLOW RATE MEMBRANE/MEDIA CHEMLOCK® KEY LENGTH RETENTION RATING CONNECTION O-RING
IHAMC1M01 Cartridge Mid-High Flux PS No 10" 7 nm N/A E-FKM
IHAMC1M01K Cartridge Mid-High Flux PS Yes 10" 7 nm N/A E-FKM
IHAMC2M01 Cartridge High Flux PS No 20" 7 nm N/A E-FKM
IHAMC2M01K Cartridge High Flux PS Yes 20" 7 nm N/A E-FKM
IHAV01P01 Cartridge Mid flux UPE No 10" 0.1 µm N/A E-FKM
IHAV01P01K Cartridge Mid flux UPE Yes 10" 0.1 µm N/A E-FKM
IHAV01PLT Cartridge Low Flux UPE No 10" 0.1 µm N/A E-FKM
IHAV01PLTK Cartridge Low Flux UPE Yes 10" 0.1 µm N/A E-FKM
IHAV02P01K Cartridge Mid-High Flux UPE Yes 20" 0.1 µm N/A E-FKM
IHAX01M01 Cartridge Mid-High Flux PS No 10" 20 nm N/A E-FKM
IHAX01M01K Cartridge Mid-High Flux PS Yes 10" 20 nm N/A E-FKM
IHAX02MK1K Cartridge High Flux PS Yes 20" 20 nm N/A Kalrez® 4079
IHAY01M01 Cartridge Mid-High Flux UPE No 10" 30 nm N/A E-FKM
IHAY01M01K Cartridge Mid-High Flux UPE Yes 10" 30 nm N/A E-FKM
IHAZ01M01 Cartridge Mid-High Flux UPE No 10" 0.05 µm N/A E-FKM
IHAZ01M01K Cartridge Mid-High Flux UPE Yes 10" 0.05 µm N/A E-FKM
IHAZ01P01 Cartridge Mid flux UPE No 10" 0.05 µm N/A E-FKM
IHAZ01P01K Cartridge Mid flux UPE Yes 10" 0.05 µm N/A E-FKM
IHAZ01PLK Cartridge Low Flux UPE No 10" 0.05 µm N/A Kalrez® 4079
IHAZ01PLT Cartridge Low Flux UPE No 10" 0.05 µm N/A E-FKM
IHAZ01PLTK Cartridge Low Flux UPE Yes 10" 0.05 µm N/A E-FKM
IHAZ02P01 Cartridge High Flux UPE No 20" 0.05 µm N/A E-FKM
IHAZ02P01K Cartridge High Flux UPE Yes 20" 0.05 µm N/A E-FKM
IHAZ0SP01 Cartridge Low Flux UPE No 4" 0.05 µm N/A E-FKM
IHDMCSM4F Chem-Line™ II Large Disposable Mid-High Flux PS N/A 10" 7 nm N/A
IHDVHPS1F Chem-Line™ II Large Disposable Low Flux UPE N/A 4" 0.1 µm 3/8" inlet/outlet, 1/4" vent/drain Flaretek® fittings N/A
IHDVHPX0F Chem-Line™ II Large Disposable Mid flux UPE N/A 10" 0.1 µm 3/4" inlet/outlet, 1/4" vent/drain, Flaretek® fitting N/A
IHDXHSM4F Chem-Line™ II Large Disposable Mid-High Flux PS N/A 10" 20 nm N/A
IHDXHSS1F Chem-Line™ II Large Disposable Low Flux PS N/A 4" 20 nm 3/8" inlet/outlet, 1/4" vent/drain Flaretek® fittings N/A
IHDXHSS2F Chem-Line™ II Large Disposable Low Flux PS N/A 4" 20 nm 1/2" inlet/outlet, 1/4" vent/drain, Flaretek® fitting N/A
IHDYHPS1F Chem-Line™ II Large Disposable Low Flux UPE N/A 4" 30 nm 3/8" inlet/outlet, 1/4" vent/drain Flaretek® fittings N/A
IHDZHPM0F Chem-Line™ II Large Disposable High Flux UPE N/A 10" 0.05 µm 3/4" inlet/outlet, 1/4" vent/drain, Flaretek® fitting N/A
IHDZHPM4F Chem-Line™ II Large Disposable High Flux UPE N/A 10" 0.05 µm N/A
IHDZHPS1F Chem-Line™ II Large Disposable Low Flux UPE N/A 4" 0.05 µm 3/8" inlet/outlet, 1/4" vent/drain Flaretek® fittings N/A
IHDZHPS2F Chem-Line™ II Large Disposable Low Flux UPE N/A 4" 0.05 µm In-line male, 1/2" inlet/outlet, 1/4" vent/drain, Flaretek® N/A
IHDZHPX0F Chem-Line™ II Large Disposable Mid flux UPE N/A 10" 0.05 µm 3/4" inlet/outlet, 1/4" vent/drain, Flaretek® fitting N/A
IHDZHPX2F Chem-Line™ II Large Disposable Mid flux UPE N/A 10" 0.05 µm 1/2" inlet/outlet, 1/4" vent/drain, Flaretek® fitting N/A
IHLMCSM0P3PM Chem-Line™ II Large Disposable Mid-High Flux PS N/A 10" 7 nm 3/4" inlet/outlet, 1/4" vent/drain, Super 300 Type Pillar® fitting N/A
IHLMCSM4P3PM Chem-Line™ II Large Disposable Mid-High Flux PS N/A 10" 7 nm 1" inlet/outlet, 1/4" vent/drain, Super 300 Type Pillar® fitting N/A
IHPXHSM3S Chem-Line™ I Large Disposable Mid-High Flux PS N/A 10" 20 nm 3/4" inlet/outlet, 1/2" vent/drain, Super 300 Type Pillar® fitting N/A
IHPXHSM4S Chem-Line™ I Large Disposable High Flux PS N/A 10" 20 nm 1" inlet/outlet, 1/2" vent/drain, Super 300 Type Pillar® fitting N/A
IHPYHPM4S Chem-Line™ I Large Disposable High Flux UPE N/A 10" 30 nm 1" inlet/outlet, 1/2" vent/drain, Super 300 Type Pillar® fitting N/A
IHPZHPM3S Chem-Line™ I Large Disposable High Flux UPE N/A 10" 0.05 µm 3/4" inlet/outlet, 1/2" vent/drain, Super 300 Type Pillar® fitting N/A
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