A reliable and cost-effective solution for CMP slurry and high-purity chemical distribution systems. An innovative diaphragm design maximizes stroke, enabling a very high flow rate with a small footprint.
- Unique internal radius enables a fully swept, increased flow path, decreased pressure drop and reduced shear
- All wetted parts are PFA and PTFE, external parts are PVDF, providing higher chemical resistance and reliability
- No external metal parts and no metals in secondary containment chamber means lower contamination potential in the event of a media leak or exposure to harsh external environments
- External, nonwetted components are available in ECTFE material for higher chemical resistance to oxygenated solvents and bases
CMP浆料和高纯度化学品分配系统的可靠且经济的解决方案。创新的隔膜设计使冲程最大化，以较小的占地面积实现非常高的流量。独特的内半径可实现完全吹扫、增加流路、降低压降和减少剪切。所有润湿部件为PFA和PTFE，外部部件为PVDF，提供更高的耐化学性和可靠性。无外部金属部件和二级密封室中无金属意味着在介质泄漏或暴露于恶劣外部环境的情况下污染可能性更低。外部非润湿部件可用于ECTFE材料，对氧化溶剂和碱具有更高的耐化学性
Port ConnectionFlow Factor CVFlow Factor KVABCD3/4" Flaretek16.795.75.27" (133.9 mm)0.80" (20.3 mm)3.87" (98.3 mm)4.17" (105.9 mm)3/4" Super 300 Type Pillar fitting6.795.75.25" (133.4 mm)0.80" (20.3 mm)3.87" (98.3 mm)4.17" (105.9 mm)3/4" PrimeLock6.795.75.92" (150.4 mm)0.96" (24.4 mm)4.23" (107.4 mm)4.53" (115.1 mm)3/4" PureBond8.2117.14.67" (118.6 mm)0.80" (20.3 mm)3.87" (98.3 mm)4.17" (105.9 mm)1" Flaretek19.8140.05.74" (145.8 mm)0.96" (24.4 mm)4.23" (107.4 mm)4.53" (115.1 mm)1" Super 300 Type Pillar fitting9.8140.05.75" (146.1 mm)1.04" (26.4 mm)4.31" (109.5 mm)4.61" (117.1 mm)1" PrimeLock9.8140.06.26" (159.0 mm)1.12" (28.4 mm)4.39" (111.5 mm)4.69" (119.2 mm)1" PureBond10.9155.74.67" (118.6 mm)0.96" (24.4 mm)4.23" (107.4 mm)4.53" (115.1 mm)
